JPH0128670Y2 - - Google Patents
Info
- Publication number
- JPH0128670Y2 JPH0128670Y2 JP1393982U JP1393982U JPH0128670Y2 JP H0128670 Y2 JPH0128670 Y2 JP H0128670Y2 JP 1393982 U JP1393982 U JP 1393982U JP 1393982 U JP1393982 U JP 1393982U JP H0128670 Y2 JPH0128670 Y2 JP H0128670Y2
- Authority
- JP
- Japan
- Prior art keywords
- lid
- support plates
- support plate
- long support
- wafer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000004065 semiconductor Substances 0.000 claims description 8
- 238000004519 manufacturing process Methods 0.000 claims description 6
- 238000007747 plating Methods 0.000 description 18
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 5
- 239000010931 gold Substances 0.000 description 5
- 229910052737 gold Inorganic materials 0.000 description 5
- 239000000428 dust Substances 0.000 description 4
- 239000007788 liquid Substances 0.000 description 3
- 238000006243 chemical reaction Methods 0.000 description 1
- 230000008602 contraction Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000000866 electrolytic etching Methods 0.000 description 1
- 238000001465 metallisation Methods 0.000 description 1
- 230000002265 prevention Effects 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
Landscapes
- Prevention Of Fouling (AREA)
- Electrodes Of Semiconductors (AREA)
- Weting (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1393982U JPS58116226U (ja) | 1982-02-03 | 1982-02-03 | 半導体装置の製造装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1393982U JPS58116226U (ja) | 1982-02-03 | 1982-02-03 | 半導体装置の製造装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS58116226U JPS58116226U (ja) | 1983-08-08 |
| JPH0128670Y2 true JPH0128670Y2 (en]) | 1989-08-31 |
Family
ID=30026424
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1393982U Granted JPS58116226U (ja) | 1982-02-03 | 1982-02-03 | 半導体装置の製造装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS58116226U (en]) |
-
1982
- 1982-02-03 JP JP1393982U patent/JPS58116226U/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS58116226U (ja) | 1983-08-08 |
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